JPH0377667B2 - - Google Patents

Info

Publication number
JPH0377667B2
JPH0377667B2 JP56124903A JP12490381A JPH0377667B2 JP H0377667 B2 JPH0377667 B2 JP H0377667B2 JP 56124903 A JP56124903 A JP 56124903A JP 12490381 A JP12490381 A JP 12490381A JP H0377667 B2 JPH0377667 B2 JP H0377667B2
Authority
JP
Japan
Prior art keywords
diffusion region
insulating film
conductivity type
type diffusion
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56124903A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5825258A (ja
Inventor
Natsuo Tsubochi
Shigeo Nagao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP56124903A priority Critical patent/JPS5825258A/ja
Publication of JPS5825258A publication Critical patent/JPS5825258A/ja
Publication of JPH0377667B2 publication Critical patent/JPH0377667B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
    • H10D84/82—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
    • H10D84/83—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET]
    • H10D84/85—Complementary IGFETs, e.g. CMOS
    • H10D84/857—Complementary IGFETs, e.g. CMOS comprising an N-type well but not a P-type well

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP56124903A 1981-08-07 1981-08-07 相補形ｍｏｓ集積回路 Granted JPS5825258A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56124903A JPS5825258A (ja) 1981-08-07 1981-08-07 相補形ｍｏｓ集積回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56124903A JPS5825258A (ja) 1981-08-07 1981-08-07 相補形ｍｏｓ集積回路

Publications (2)

Publication Number Publication Date
JPS5825258A JPS5825258A (ja) 1983-02-15
JPH0377667B2 true JPH0377667B2 (en]) 1991-12-11

Family

ID=14896955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56124903A Granted JPS5825258A (ja) 1981-08-07 1981-08-07 相補形ｍｏｓ集積回路

Country Status (1)

Country Link
JP (1) JPS5825258A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2509173B2 (ja) * 1985-02-08 1996-06-19 株式会社日立製作所 相補型ｍｉｓｆｅｔを有する半導体集積回路装置の製造方法

Also Published As

Publication number Publication date
JPS5825258A (ja) 1983-02-15

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